It is exciting that eventually we have started installations of both RIE and e-beam evaporator in our expanded cleanroom area. With these two critical tools incorporated, the...
Recently the research of soft electronic circuits done by our user Dr. Shanliangzi Liu from Rebecca Kramar group in the Department of Mechanic Engineering & Materials...
The AutoGlow 200 Etcher has been installed and is ready to use in our Cleanroom with two process gases, Ar and O2 available.
Some key applications:
Surface modification,...
