Instrument

X-ray Photoelectron Spectroscopy (XPS)

PHI VersaProbe III AD Scanning XPS Microprobe

The core technology of the VersaProbe III AD is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance.

Features:

  • Air protection vessel: enabling sample workflow from glovebox to XPS directly.

  • Multi-point mode: automated high throughput scan on multiple positions/samples.

  • Micro area approach: in situ x-ray imaging at high spatial resolution (<10 µm) for elemental and chemical state analysis, including mapping and line profile.

  • Thin film profile analysis: using Ar ion, or C60 cluster gun with minimized chemical state damage.

  • Angle resolved XPS (non-destructive): thickness and composition analysis of ultra-thin films.

  • UPS: valence band structure and work function measurement using low energy UV source (He I: 21.2 eV and He II: 40.8 eV). 

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Scanning Electron Microscopy (SEM)

Hitachi SU8230 UHR Cold Field Emission (CFE) SEM

Hitachi’s next generation Cold Field Emission SEM offers unmatched low‑voltage imaging and comprehensive analytical microanalysis with the uncompromised performance of CFE.

Features:

  • High image resolution: 0.8 nm.
  • Air protection vessel: enabling the workflow from glovebox to SEM directly.
  • EDS (horizontal insert): ~10-100 times high signal sensitivity than tilted model; Featured with 10 – 100 nm mapping resolution with higher sensitivity to light element detection.
  • Deceleration mode (0.1-1 kV): enhanced surface details and high resolution on 2D materials.
  • STEM: scanning TEM capability.
  • External BSE (photodiode backscattered electron) horizontal insert detector.

X-ray Diffraction (XRD)

Rigaku SmartLab X-ray Diffractometer

The SmartLab X-ray Diffraction System includes a highly stable and reliable sealed tube x-ray generator that is fully integrated within the automated diffraction system and is compatible with the full range of SmartLab goniometer configurations.

Features:

  • Full automated alignment under computer control
  • A high-efficiency scintillation detector with high-count rate
  • Cross Beam Optics (CBO) permits easy switching between focusing (BB) and parallel beam (PB) geometries without reconfiguration
  • In-plane diffraction arm for in-plane measurements without reconfiguration
  • High temperature (~1500 C) measurements in air, vacuum and Helium
  • Air-Tight Sample Container for contamination free measurement

Raman Spectroscopy

Horiba LabRAM HR Evolution 

The LabRAM HR Evolution systems are ideally suited to both micro and macro measurements, and offer advanced confocal imaging capabilities in 2D and 3D. The true confocal microscope enables the most detailed images and analysis to be obtained with speed and confidence.

Features:

  • Auto sampler stage (10 samples): automated high throughput scans.

  • High temperature attachment: in situ temperature (<1500 ºC) dependent scans in air, vacuum or inert gas (argon and helium).

  • Air protection vessel: enabling sample workflow from glovebox to XRD.

  • Micro size sample analysis.

  • Thin film analysis: stress test, GI XRD, rock curve, In-plane diffraction, etc. 

Manufacturer product page

Physical Property Measurement System (PPMS)

Quantum Design PPMS® DynaCool™

The instrument uses a single two-stage Pulse Tube cooler to cool  the superconducting magnet and the samples under study, providing a low vibration environment for electronic measurements. It employs a unique He-4 -based gas flow control system providing rapid temperature cycling and accurate temperature control. It also comes standard with an integrated Cryopump used to pump out the sample space to a vacuum of < 10-4 Torr. 
Features:

  • Temperature range: 0.3 K – 400 K

  • Magnetic field: ±14 Tesla.

  • Electrical Transport Option (ETO): AC Resistance measurements (frequency range: 0.1 – 200 Hz), Hall Effect, I-V sweeps. Measurement sensitivity: a few nV; resistance range: a few μΩ to GΩ.

  • Vibrating Sample Magnetometer (VSM): measuring static (DC) magnetic moment as a function of temperature or field. Can take small single crystals, thin films (can be oriented with applied field in- or out-of film plane), sintered polycrystalline pieces and loose powders. 

X-ray Fluorescence (XRF)

Rigaku ZSX Primus II XRF Spectrometer

The ZSX Primus II with its tube-above optics is a fully automated, sequential WDXRF spectrometer incorporating a smaller footprint and the most advanced design in the WDXRF industry. The tube-above optics of the ZSX Primus II, coupled with the ultra-thin end-window Rh target X-ray tube, guarantees reliability, flexibility and ease of use. Micro Analysis, down to 500 microns, and Mapping is now a field upgradeable option.

Features:

  • Wavelength Dispersive X-ray Fluorescence (WDXRF): high spectral resolution (typically 5 – 20 eV) with minimal spectral overlaps.

  • Measurement range: Be to U.

  • Tube above optics: minimizes contamination issues.

  • Micro analysis: analyze samples as small as 500 µm.

  • Mapping: obtain elemental topography/distribution.

BET Surface Area and Porosity Analysis (affiliated with Energy Sciences Institute)

Micromeritics ASAP 2460 Surface Area and Porosity Analyzer

The instrument incorporates a unique expandable system designed for high-performance and high sample throughput. It also includes intuitive MicroActive software that combines user-defined reports with the ability to interactively evaluate isotherm
 

Features:

  • Fully automated modular system optimized for walk-up sample screening
  • High throughput with two, four, or six independent analysis stations
  • BET surface area measurements in as little as 30 minutes
  • Dosing options of maximum volume increment or dosing over specified pressure ranges
  • Analysis temperature can be entered, calculated, or measured
  • Equilibration option allows user to specify equilibration times for different parts of the isotherm
  • Low surface area and micropore options
  • Innovative MicroActive software with advanced NLDFT modeling
  • State-of-the-art engineering ensures excellent accuracy, repeatability, and reproducibility from all ports, from the master control unit through one or two auxiliary analysis units.

Focused Ion Beam - Scanning Electron Microscopy (FIB-SEM) (Affilated with ACEM Core)

ThermoFisher Helios G4 UX DualBeam for Materials Science

Fastest and easiest preparation of the highest quality samples for HR S/TEM and APT

Features:

  • High quality ultra-thin TEM sample preparation: automated sample preparation using AutoTEM allows multiple lamella preparation for final polishing.
  • Low-energy (>500 eV) final polishing: minimizes sample damage for high quality TEM lamellas.
  • Slice and view: automated sequential mill and view to collect series of slices images. Allow sample 3D reconstruction for further analysis such as 3D segmentation.
  • EDS: allows simultaneous EDS mapping for 3D reconstruction
  • EBSD: provides grain orientation maps, grain boundary maps, phase maps and pole figures.
  • FIB patterning: creates small structures with feature size down to tens of nanometers via 3D ion milling and deposition.
  • E-beam lithography: e-beam writing on resist coated surface for device fabrication with feature size smaller than 10 nm.

Manufacturer product page

Microsensor Multimeter (affiliated with Energy Sciences Institute)

Unisense Microsensor Multimeter

This unit is a four-channel laboratory amplifier that enables you to measure multiple parameters at once. Two channels for amperometric sensors (O2, NO, H2, H2S, N2O, NOx-), one for potentiometric sensors (pH and Redox) and one channel for a temperature sensor give you complete flexibility for your experiments. It is easy to operate with automatic sensor recognition for most Unisense microsensors, OLED display, and direct communication to PC via USB connection.

Features:

  • Ease of use and simple data acquisition
  • Automatic sensor detection
  • Operated via OLED display and keypad
  • USB connectivity to Windows PC
  • Battery, external voltage, or mains power operation
  • Free SensorTrace Logger software included

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Thin Film Deposition Systems (affiliated with Energy Sciences Institute)

FijiTM 200 Gen 2

Plasma Atomic Layer Deposition System

Features:
 
  • Continuous Mode™ (Traditional Thermal ALD)
  • Exposure Mode™ (High Aspect Ratio ALD)
  • Plasma Mode™ (Plasma-Enhanced ALD)
  • Substrate Size: up to 200 mm
  • Substrate Temperature: 500°C 200 mm substrate heater standard; 800°C 100 mm substrate heater optional
  • Deposition Uniformity: 1σ Uniformities; Thermal Al2O3 – 1.5% Plasma Al2O3 – 1.5%
  • Precursors: 4 precursor lines standard; 6 precursor lines optional; Accommodates gas, liquid, or solid precursors; Individually heatable to 200°C
  • Gases: 100 sccm Ar precursor carrier gas MFC; 200 sccm Ar plasma gas MFC; 100sccm N2 plasma gas MFC; 100 sccm O2 plasma gas MFC; 100 sccm H2 plasma gas MFC

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MB-EcoVap Thin Film Coater (MBRAUN)

Features:
 
  • For substrates up to 70 x 70 mm or 100 mm wafers
  • Automatic chamber lifting mechanism
  • Shielded view port for visual process monitoring
  • Recipe programmable PLC control
  • Removable protective shielding
  • Compatible with most standard deposition sources
  • Ergonomic to operate, easy to clean
  • UL listed and CE compliant

Manufacturer product page