October 29, 2020
The AutoGlow 200 Etcher has been installed and is ready to use in our Cleanroom with two process gases, Ar and O2 available.
Some key applications:
- Surface modification,
- Substrate cleaning before deposition or coating,
- SU8 treatment for microfluidics,
- PDMS activiation prior to bonding.
For more details, please check Equipment features