XPS facility reservation restricted for one week starting 6/13/2016

June 1, 2016

XPS users,

the PHI company service engineer will come to do some maintenance works including a frame support install for transfer rod and main chamber stage calibration. It will take entire one week (6/13 - 6/17) during which the facility cannot be reserved by users. The XPS should be back to normal operation for reservation the following week unless a further notice is given.