October 11, 2022
A Navigation Camera was recently installed and tested on our Hitachi SEM system. Users need to insert the sample holder into the camera base and capture a photo before sample loading. Once the sample holder is in the SEM chamber and the ebeam voltage is turn on, a simple mouse click on the captured sample photo will drive the stage to where clicked. It should be very convenient with multiple samples mount on the holder, especially when the EDS detector is blocking most of image window. The updated SOP will guide you through the steps for the operation.