Reactive Ion Etcher installed in West Campus Cleanroom!

December 21, 2021

We are very excited to anounce that the Oxford PlasmaPro 100 Reactive Ion Etcher installation is complete. We expect the machine is open to our users in the beginnning of the new year. If you are interested to learn more about the features of this tool, please check out the West Campus Cleanoom equipment page and contact Dr. Lei Wang for accessibilities.