KLA Stylus Profiler available in West Campus Cleanroom!

November 23, 2022

A new KLA Tencor P7 Stylus Profiler has been installed and ready for our users. This profiler supports 2D and 3D measurements of step heights, defect surface topography, roughness and waviness, bow, and thin film stress for scans up to 150mm.


  • Step height scan from Nanometers to 1000µm,
  • Low force with constant force control from 0.03 to 50mg,
  • Scan full diameter of the sample without stitching,
  • Fully automated with sequencing and pattern recognition,
  • Easy-to-use software interface.