Hitachi SEM Talk by Atsushi Muto

September 27, 2016

Mr. Atsushi Muto is a Senior Applications Engineer in the Nanotechnology Systems Division of Hitachi High Technologies America, Inc., and works from the Clarksburg, MD, office. In his current role, provides technical expertise, applications development and collaborative research activities.  His research interests include FE-SEM system development, broad ion beam/focused ion beam applications and variable pressure electron microscopes. 

Topic: Let’s maximize your SU8230 capabilities! Review of SU8230 capability and introduction of latest application using Hitachi UHR FE-SEM


The Hitachi SU8230 SEM is the ultra high resolution scanning electron microscope installed at Yale University West Campus Materials Characterization Core.  This talk will include a discussion and review of the imaging performance and capabilities of the microscope.  This will include low voltage imaging utilizing beam deceleration, low voltage backscattered electron detection, and how to maximize imaging performance using the various detectors on the microscope.  Sample preparation is also critical to quality results, we will discuss the latest in sample preparation techniques for UHR imaging.  Finally, there will be an introduction to some of the latest applications in UHR FE-SEM being developed by Hitachi.