AutoGlow 200 Etcher is coming to West Campus Cleanroom!

October 29, 2020

The AutoGlow 200 Etcher has been installed and is ready to use in our Cleanroom with two process gases, Ar and O2 available.

Some key applications:

  • Surface modification,
  • Substrate cleaning before deposition or coating,
  • SU8 treatment for microfluidics, 
  • PDMS activiation prior to bonding.

For more details, please check Equipment features