Zygo Optical Profiler installed at West Campus

May 3, 2017

A Zygo Nexview 3D optical surface profiler was just installed in our West Campus Cleanroom Core. This profiler can measure all surfaces from super-smooth to very rough, with sub-nanometer precision, independent of field of view. Measurement types include flatness, roughness, large steps and segments, thin films, and steep slopes, with feature heights ranging from < 1 nm up to 20000 µm.

Instrument introduction