Hitachi SU8230 hardware upgrade for EDS protection

July 26, 2016

The Hitachi service engineer, Bill Hardy has just replaced the specimen chamber door which lowers the “EXC” position from 8 mm to 13 mm. A new detection mode “FQ-EDX”, the Flat Quad EDX detector currently in use was added in the “Set Sample Size/ Detectors” window. When “FQ-EDX” box is checked, the stage will move to a new Z-position, 14 mm. Please Do Not check “EDX” box which is designed for tilted EDX detector, not for our SEM system.